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    基于准同步激光的可控矩阵式超快植球工艺研究

    Research on Controllable Matrix-type Ultrafast Soldering Process Enabled by Quasi-synchronous Laser

    • 摘要: 准同步激光因其超小的光斑及超高的能量密度,可广泛应用于特殊器件的局部加热以防止整体加热损坏已有器件,因此在开发全新温度梯度的同时,引入准同步激光是集成电路制造领域一个值得重点探索的工作。文中以采用准同步激光植球法形成的焊球形貌和焊球与基板的结合强度优于20 MPa为判定标准,研究激光功率、离焦量、扫描路径、跳转延时和单点出光时间5个变量对植球效果的影响,并对参数进行了系统总结和优化,得到一致性好、表面圆润、与焊盘润湿良好、剪切强度大的高效激光植球技术。该研究创造性地完成了准同步激光植球工艺技术的研究,首次提出了可控矩阵式超快植球工艺参数,同时实现了植球效率的倍增,平均每颗球约0.18 s,相较于之前传统的激光喷射植球法的约0.5 s一颗球,效率提升了300%,为先进封装领域的多层级封装提供了技术储备。

       

      Abstract: Quasi-synchronous lasers, owing to their infinitesimal spot sizes and remarkably elevated energy intensities, possess extensive application in the precise local heating of particular devices, which can effectively preclude potential damage to the components that might otherwise result from wholesale heating. Thus, within the framework of devising novel temperature gradients, the integration of quasi-synchronous lasers emerges as a pivotal research in the discipline of integrated circuit fabrication. In this paper, taking the solder ball morphology yielded by the quasi-synchronous laser ball-mounting technique and the adhesion strength exceeding 20 MPa between the solder ball and the substrate as the decisive assessment criteria, the influences of laser wattage, defocus distance, scanning pathway, jump postponement and single-point irradiation time on the ball-mounting outcome are meticulously analyzed. The parameters are systematically summarized and optimized and an advanced laser ball-mounting technology has been achieved characterized by good homogeneity, flawless surface finish, excellent wetting characteristics with respect to the pads and substantial shear resistance. This research has pioneered the exploration of the quasi-synchronous laser ball-mounting process technology. The concept of controllable matrix-type ultrafast soldering process parameters is introduced for the first time. Simultaneously, the ball-mounting efficiency has been doubled. On average, it takes merely about 0.18 s per ball. Compared with the conventional laser jet ball-mounting method, which typically requires around 0.5 s per ball, the efficiency has been increased by 300%, thereby endowing the advanced packaging domain with a valuable technological reserve for multi-level packaging applications.

       

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