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    SiC/AMB纳米银封装设备设计及验证

    Development of a Pressure-Assisted Nano-silver Sintering System for SiC/AMB Substrates

    • 摘要: 本文设计并开发了一种面向碳化硅功率模块封装的高精度纳米银烧结系统,该系统通过多场协同控制实现了对烧结工艺关键参数(温度、压力及气氛)的精确调控。设备采用分区直管加热与气动增压方案,结合低氧气氛控制,在230℃、25MPa工艺条件下可实现优于±3%的压力均匀性与±3℃的温度均匀性,氧含量维持在50ppm以下。利用压敏纸法与多热电偶测温验证了分布性能,并结合超声与CT检测表明,所获接头界面孔洞率低、连接可靠。有限元分析揭示了烧结过程中芯片边缘应力较高、中心较低的分布规律。该设备及工艺为高性能功率电子器件的可靠封装提供了有效解决方案。

       

      Abstract: This paper presents the design and development of a high-precision nano-silver sintering system for silicon carbide power module packaging. The system achieves precise control over key sintering process parameters—temperature, pressure, and atmosphere—through multi-field cooperative control. The equipment employs a zoned straight-tube heating system and a pneumatic pressure boost scheme, combined with low-oxygen atmosphere control. Under the process conditions of 230°C and 25 MPa, it achieves a pressure uniformity better than ±3% and a temperature uniformity within ±3°C, while maintaining oxygen content below 50 ppm. The uniformity of pressure and temperature distribution was validated using pressure-sensitive paper and multiple thermocouples, respectively. Ultrasonic and CT inspections confirmed that the resulting joint interfaces exhibit low porosity and high connection reliability. Finite element analysis revealed a stress distribution pattern during sintering where higher stress occurs at the chip edges and lower stress in the central area. This equipment and process provide an effective solution for reliable packaging of high-performance power electronic devices.

       

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