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    基于虚拟波面校正的轴承滚珠干涉测量系统

    Bearing Ball Measurement System with Laser Interferometry Based on Virtual Wavefront Calibration

    • 摘要: 激光干涉测量系统具有无损伤、测量精度高等优势,但在测量轴承滚珠时,待测滚珠的定位精度会不可避免地引入偏差。该偏差将掩盖待测滚珠轴承的真实面形误差,使得测量精度难以得到保证。文中在现有激光干涉测量系统的基础上,提出一种虚拟波面校正方法对轴承滚珠进行测量。该方法在不增加系统硬件的前提下采用光线追迹方法生成虚拟波面,通过虚拟波面对干涉系统实际测量产生的定位误差进行补偿,从而提高干涉测量系统的精度。干涉测量系统对轴承滚珠进行的测量实验表明,该系统的最大偏差不超过λ/40(峰谷值)和λ/80(均方根值)(λ为测量光在真空条件下传播的波长),验证了该干涉测量系统及误差校正方法的有效性。

       

      Abstract: The laser interferometry measurement system is a non-destructive measurement system with high accuracy. However, when it is utilized to measure the bearing ball, the deviation is introduced unavoidably in the positioning accuracy of the bearing ball to be measured. This deviation conceals the real surface error of the bearing ball, which makes it difficult to guarantee the measurement accuracy of bearing ball. Based on the existing laser interferometry measurement system, a virtual wavefront calibration method is proposed to measure the bearing ball in this paper. With the ray tracing method, the virtual wavefront is generated to compensate the positioning error without any additional component in order to ensure the accuracy of the interferometric measurement system. The experiments show that the maximum positioning error of this measurement system is not more than λ/40 (peak to valley) and λ/80 (root mean square), (λ is the wavelength of measuring light propagation in a vacuum condition), which verifies the effectiveness of this method and this measurement system.

       

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