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    基于汽液复合通道的超薄均热板制造及性能研究

    A Study on Fabrication and Performance of an Ultra-thin Vapor Chamber with Vapor-liquid Compound Channel

    • 摘要: 随着航空航天器件对数据处理能力的不断提升,以及电子器件的小型化与集成化发展,芯片热流密度显著增加,对热管理系统提出了更为严苛的要求。文中提出一种基于汽液复合通道的超薄均热板制造方法,液体通道采用铜编织丝网与束状编织纤维叠层烧结形成的吸液芯结构,同时结合碱腐蚀工艺优化束状编织纤维的纵向液体输运性能。在铜基板上蚀刻蒸汽腔体、支撑柱等结构,通过高温钎焊、灌注液态工质、抽真空、除气、电阻焊封口等工艺,制备出厚度为0.55 mm的超薄相变传热均热板,并对不同注液率的均热板的传热性能进行了测试。结果表明:50%注液率的均热板的平均热阻最小,其在70 W/cm2热流密度下的热阻低至0.015 cm2·℃/W,在130 W/cm2的高热流密度条件下热阻也仅为0.127 cm2·℃/W。研究结果验证了所制备的均热板的高效传热性能,为超薄散热器件的设计与应用提供了参考。

       

      Abstract: With the continuous improvement in data processing capabilities of aerospace devices and the miniaturization and integration of electronic components, the thermal power density of chips has increased significantly, placing more stringent demands on thermal management systems. An ultra-thin vapor chamber with vapor-liquid channel fabrication method is proposed in this paper. The liquid channel features a wick structure formed by sintering a composite wick of copper wire mesh and bundled woven fiber, with its longitudinal liquid transport performance enhanced by an alkali corrosion process. The vapor cavity and support pillars are created by etching a copper substrate. The final 0.55 mm thick device is assembled through high temperature brazing, working fluid filling, vacuum pumping, degassing, and resistance sealing welding. Thermal performance evaluation of the vapor chambers with different filling ratios demonstrated that the unit with a 50% filling ratio achieved the minimum average thermal resistance, measuring as low as 0.015 cm2·°C/W at 70 W/cm2 and 0.127 cm2·°C/W even at a high heat flux of 130 W/cm2. These findings confirm the effective heat transfer performance of the vapor chamber and offer useful insights for designing ultra-thin thermal management devices.

       

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