Abstract: Aiming at the missing of three-dimension digital Research & Development standards in military electronics industry, the three-dimension process planning standard for military electronic equipment is studied. Based on analysis of standardization requirements of three-dimension process planning and the present situation for military electronics industry, a standard architecture of three-dimension process planning for military electronic equipment is established, including base process standards, special process planning standards and process management standard. And on this basis the standard is compiled. The serial of standards has great significance to specification of the three-dimension process planning for military electronic equipment and improvement of the digital Research & Development level for military electronic equipment manufacturing.