Abstract: With increase of requirements for design and operation of aeroengines, gas turbines, internal combustion engines, petrochemical equipment and so on, the need for typical high-temperature thin film sensors such as high-temperature thin film strain gauges, thermometers, heat flux gauges and thin film multi-function sensors is becoming increasingly urgent. The research status of typical high-temperature thin film sensors such as high-temperature thin film strain gauges, thermometers, heat flux gauges and thin film multi-function sensors is introduced. The existing main problems of high-temperature thin film sensors on aspects of sensitive materials, material system, manufacturing process and signal transmission are analyzed, which can provide guidance for study on the high-temperature thin film sensors for harsher environment.